Time-of-Flight Secondary Ion Mass Spectrometry (ToF SIMS)

         Kindly download Material Safety Data sheet and submit the hardcopy of filled sheet along with your sample

  Instrument Details  

Make: Physical Eelctronics, USA
Model: Trift V nano TOF

  Working Principle   

         Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) is a technique in which an ion beam (primary ion) is irradiated on a solid sample and mass separation of the ions emitted from the surface (secondary ions) is performed using the difference in time-of-flight (time-of-flight is proportional to the square root of the weight).
TOF-SIMS can obtain information regarding elements or molecular species within 1 nm of the sample surface at a very high detection sensitivity.

  Instrument Capabilities  

Mass spectrum study for elemental and organic composition
Elemental and organic species mapping
Dopant and impurity depth profiling
Elemental 3D reconstruction for profile study
Composition and impurity measurements of thin films (metals, dielectrics, SiGe)
High-precision matching of process tools such as ion implanters

  Area of Applications

     Polymer blends
     Thin films/surface coatings
     Geologic materials
     Glass industries
  Instrument Specification  
Analyzer Specification
Primary Ion  Ga+            
Energy  30keV            
Current  5.8nA            
Area  50X50um2            
Cycle Time  1 Frame (i.e 13.11sec =1 Frame)            
Modes of Operation  Positive and Negative            
Sputter GunType & Specification
Sputter Primary Ion  Cs (Sputter Ion Gun)    Oxygen &Argon (Gas gun)  
Energy  3keV    3keV  
Current  620.00nA    780.00nA  
Area  650x650um2    450x450um2  
SpIDD  we can calculate as per requirement            
Charge Compensation
  with Ion Neutralizer (<10eV) flood of Ar+E Gun (<10eV) pulsed focused electron beam
Other capabilities and features
  3 D mapping capability
  Stylus Profilometer (accessory)

  Contact Us   

         Mr. Nilesh Raghunath Marle
         CRNTS/SAIF IIT Bombay
         Contact : 022-2159 6872
         Email Id : simslab@iitb.ac.in

  ToF SIMS Charges includes GST   
Tof-SIMS Analysis
Per sample/Per session
IndustryUniversityNational Lab/R&D's
9440/- 1770/-4248/-