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Make : |
Bruker |
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Model: |
DektakXT |
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Stylus: |
2 um Radius, 12.5um Radius |
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Scan Type : |
Standard Scan
Static Tower
scan
Static scan
Map Scan 3D |
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Range (vertical): |
6.5 um
65.5 um
524 um
1 mm
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Profile: |
Hills
Valley
Hills & Valleys
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Stylus Force: |
1 mg - 15 mg |
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Scan length: |
scan length between
50 um to 55 mm
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Stylus profilometers
use a probe to detect the surface, physically moving a probe along the surface in order to
acquire the surface height. This is done mechanically with a feedback loop that monitors the
force from the sample pushing up against the probe as it scans along the surface. A feedback
system is used to keep the arm with a specific amount of torque on it, known as the
‘setpoint’. The changes in the Z position of the arm holder can then be used to reconstruct
the surface. The DektakXT system takes measurements electromechanically by moving a diamond
–tipped stylus over the sample surface according to user-programmed scan length, speed and
stylus force.
Because a stylus profilometer involves physical movements in X, Y, and Z while
maintaining contact with the surface, it is slower than non-contact techniques. The stylus
tip size and shape can influence the measurements and limit the lateral resolution.
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 The DektakXT stylus surface profiler is
an advanced thin and thick film step height measurement tool.
Profiling surface topography and
waviness.
In addition to taking two-dimensional
surface profile measurements, the DektakXT system can produce three-dimensional measurements
(3D Mapping) also.
Stress Measurement for calculating
tensile or comprehensive stress on processed wafers.
Metal etch uniformity on wafers
Solar
cell finger width and height
Thin-film stress calculations
Transparent films/photoresist thickness, thin and
thickfilm measurements
Microlens height/curvature and V-groove depth
analyses
Roughness studies on machined parts
Surface quality and defect
review
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